FABRICATION OF PYRAMIDAL CAVITY STRUCTURE WITH MICRON-SIZED TIP USING ANISOTROPIC KOH ETCHING OF SILICON (100). Jurnal Teknologi (Sciences & Engineering), [S. l.], v. 74, n. 10, 2015. DOI: 10.11113/jt.v74.4846. Disponível em: https://journals.utm.my/jurnalteknologi/article/view/4846.. Acesso em: 29 apr. 2025.