INVESTIGATION OF TORSIONAL DEFLECTION AS AN UNDESIRED MOTION IN ATOMIC FORCE MICROSCOPY WITH SIDEWALL PROBE. Jurnal Teknologi (Sciences & Engineering), [S. l.], v. 76, n. 1, 2015. DOI: 10.11113/jt.v76.4079. Disponível em: https://journals.utm.my/jurnalteknologi/article/view/4079.. Acesso em: 7 dec. 2025.