INVESTIGATION OF TORSIONAL DEFLECTION AS AN UNDESIRED MOTION IN ATOMIC FORCE MICROSCOPY WITH SIDEWALL PROBE. Jurnal Teknologi, [S. l.], v. 76, n. 1, 2015. DOI: 10.11113/jt.v76.4079. Disponível em: https://journals.utm.my/jurnalteknologi/article/view/4079.. Acesso em: 1 jul. 2024.