INFLUENCE OF SUBSTRATE MATERIALS ON THE STRUCTURAL PROPERTIES OF ZNO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING. Jurnal Teknologi, [S. l.], v. 76, n. 9, 2015. DOI: 10.11113/jt.v76.5650. Disponível em: https://journals.utm.my/jurnalteknologi/article/view/5650.. Acesso em: 23 jul. 2024.