SIMULATION STUDY OF CONVEX CORNER UNDERCUTTING IN KOH AND TMAH FOR A MEMS PIEZORESISTIVE ACCELEROMETER. Jurnal Teknologi, [S. l.], v. 78, n. 6, 2016. DOI: 10.11113/jt.v78.4914. Disponível em: https://journals.utm.my/jurnalteknologi/article/view/4914.. Acesso em: 18 jul. 2024.