“FABRICATION OF PYRAMIDAL CAVITY STRUCTURE WITH MICRON-SIZED TIP USING ANISOTROPIC KOH ETCHING OF SILICON (100)”. Jurnal Teknologi (Sciences & Engineering) 74, no. 10 (June 21, 2015). Accessed September 13, 2026. https://journals.utm.my/jurnalteknologi/article/view/4846.