EVALUATION ON THE EGFET PH SENSING PERFORMANCE OF SOL-GEL SPIN COATED TITANIUM DIOXIDE THIN FILM

Authors

  • Muhammad AlHadi Zulkefle aIntegrated Sensors Research Group, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia bNANO-ElecTronic Centre, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia https://orcid.org/0000-0002-5467-3257
  • Sukreen Hana Herman Integrated Sensors Research Group, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia https://orcid.org/0000-0003-1588-557X
  • Rohanieza Abdul Rahman aIntegrated Sensors Research Group, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia bNANO-ElecTronic Centre, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia https://orcid.org/0000-0001-9313-1365
  • Khairul Aimi Yusof aIntegrated Sensors Research Group, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia bNANO-ElecTronic Centre, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia
  • Aimi Bazilah Rosli aIntegrated Sensors Research Group, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia bNANO-ElecTronic Centre, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia
  • Wan Fazlida Hanim Abdullah Integrated Sensors Research Group, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia
  • Zurita Zulkifli NANO-ElecTronic Centre, Faculty of Electrical Engineering, University Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia

DOI:

https://doi.org/10.11113/jurnalteknologi.v83.16313

Keywords:

EGFET, pH sensors, sol-gel spin coating, thickness, thin films, titanium dioxide

Abstract

For this study, TiO2 thin film was fabricated using the sol-gel spin coating method. The fabricated film was then applied as a sensing membrane in an extended gate field effect transistor (EGFET) pH sensor system. The pH sensing performance of the sol-gel spin-coated TiO2 was evaluated in terms of sensitivity, linearity, and hysteresis where the value obtained was 58.70 mV/pH, 0.9922, and 86.17 mV respectively. The drift rate of the sample when being measured for 12 consecutive hours was also determined where measurement in pH 4, pH 7, and pH 10 yield drift rate of 1.72 mV/h, 4.14 mV/h, and 6.05 mV/h respectively.  Besides that, the TiO2 was characterized for its thickness (24.32 nm) and surface roughness (5.129 nm). From the results obtained, it was found that sol-gel spin-coated TiO2 thin film with thickness between 20 - 29 nm will have high pH sensitivity (more than 50 mV/pH).

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Published

2021-06-07

How to Cite

Zulkefle, M. A. ., Herman, S. H. ., Abdul Rahman, R. ., Yusof, K. A. ., Rosli, A. B. ., Abdullah, W. F. H. ., & Zulkifli, Z. . (2021). EVALUATION ON THE EGFET PH SENSING PERFORMANCE OF SOL-GEL SPIN COATED TITANIUM DIOXIDE THIN FILM. Jurnal Teknologi, 83(4), 119-125. https://doi.org/10.11113/jurnalteknologi.v83.16313

Issue

Section

Science and Engineering