Miniaturized Planar Sensor Development
DOI:
https://doi.org/10.11113/jt.v69.3303Keywords:
Planar sensors, polydimethylsiloxane (PDMS), printed circuit board (PCB), capacitance measurementAbstract
This paper describes the process of developing a miniature device with planar sensors utilizing electrical capacitance measurement. The project investigates the feasibility and characterization of a miniaturized planar sensor integrated on a polydimethylsiloxane (PDMS) chamber. A 16-planar-electrodes array, with each dimension of the electrode, 4 mm × 2 mm (length × width) was fabricated using a printed circuit board (PCB) technology due to its low cost advantage. The measurement chamber for the sensing area was fabricated using PDMS. The PDMS chamber was bonded on the PCB with a semi cured PDMS to create a round sensing area for sample loading. The mould to develop the PDMS chamber was designed using AutoCAD 2010 and was fabricated using a 3D printer. Capacitance measurement of the planar electrodes was carried out using water as the sample and was validated using a theoretical calculation. Experimental result shows that the distance of the measured electrodes is inversely proportional to the capacitance value. The range of the measured capacitances of the measurement varies from 10 pF to 20 pF. The result shows that the planar sensors are able to provide capacitance measurement within the miniaturized platform where the measured capacitance showed good agreement with the theoretical calculation. Â
References
Chen Yu, Z.j., and Chen Deyun. 2009. Two-phase Flow Parameters Measurement and Gauss-Newton Image Reconstruction Algorithm for Electrical Capacitance Tomography. In International Conference on Industrial Mechatronics and Automation, IEEE.
Xia Li, Z.H., Baoliang Wang, and Haiqing Li. 2008. A New Method for the On-line Voidage Measurement of Gas-oil Two-phase Flow. In IEEE International Instrumentation and Measurement Technology Conference., IEEE: Victoria, Vancouver Island, Canada.
Yang, and W. 2007. Tomographic Imaging based on Capacitance Measurement and Industrial Applications. In IEEE International Workshop on Imaging Systems and Techniques. IEEE: Krakow, Poland.
Ghallab, Y. H. and W. Badawy. 2005. Techniques for Biocells Sensing, Detection and Characterization. In MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on.
Diaz-Bolado. 2011. Towards a Planar Microwave Tomography System for Early Stage Breast Cancer Detection. In General Assembly and Scientific Symposium, XXXth URSI.
Cardillo, and F. A. 2001. A Neural Tool for Breast Cancer Detection and Classification in MRI. In Engineering in Medicine and Biology Society, 2001. Proceedings of the 23rd Annual International Conference of the IEEE.
Harnett, and C. K. 2010. Nanotechnology in Environmental Sensors. Instrumentation & Measurement Magazine, IEEE. 13(2): 8–12.
Kim, T. Y., G. Y. Sung, and J. Lyou. 2010. Robust Terrain Classification by Introducing Environmental Sensors. In Safety Security and Rescue Robotics (SSRR), IEEE International Workshop on.
Marghescu. 2009. Study of Environmental Influences on the Behavior of a Capacitive Pressure Sensor. In Design and Technology of Electronics Packages, (SIITME) 15th International Symposium for.
Youngho. 2004. Improved Prostate Cancer Imaging with SPECT/CT and MRI/MRSI. In Nuclear Science SymposiumConference Record, 2004 IEEE. 2004.
Pogue, and B. W. 2012. Image-guided Spectroscopy of Cancer: Translating Optical Technology into Clinical Tools. In Lasers and Electro-Optics (CLEO), 2012 Conference on. 2012.
Ismail, and M. M. 2011. An Investigation of Electromagnetic Field Effect on a Human Skin Cell Using Numerical Method Approaches. In RF and Microwave Conference (RFM), 2011 IEEE International.
Jaemin. 2008. Analysis of Cell Separation Efficiency in Dielectrophoresis-activated Cell Sorter. In Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on.
Yu-Len, H., C. Dar-Ren, and L. Ya-Kuang. 2004. Breast Cancer Diagnosis Using Image Retrieval for Different Ultrasonic Systems. In Image Processing, 2004. ICIP '04. 2004 International Conference on.
Reyes, and D. R. 2002. Micro Total Analysis Systems. 1. Introduction, Theory, and Technology. Analytical Chemistry. 74(12): 2623–2636.
Manz, A., N. Graber, and H. M. Widmer. 1990. Miniaturized Total Chemical Analysis Systems: A Novel Concept for Chemical Sensing. Sensors and Actuators: B. Chemical. 1(1–6): 244–248.
Auroux, and P.-A. 2002 Micro Total Analysis Systems. 2. Analytical Standard Operations and Applications. Analytical Chemistry. 74(12): 2637–2652.
Yingjie, and C. 2012. Efficient Optical Pattern Detection for Microcavity Sensors Based Lab-on-a-Chip. Sensors Journal, IEEE. 12(6): 2121–2128.
Song, F., J. Xiao, and S.-W. Seo. 2013. Heterogeneously Integrated Optical System for Lab-on-a-Chip Applications. Sensors and Actuators A: Physical. 195(0): 148–153.
Crespi, and A. 2009. Femtosecond Laser Fabrication of Optical Sensors Integrated in a lab-on-a-chip. In Optomechatronic Technologies, 2009. ISOT 2009. International Symposium on.
Dae Jin, and O. 2010. A Disposable Polymer Waveguide Lab-on-a-Chip for Real-time Detection of Protein c using evanescent wave. In Sensors, 2010 IEEE.
Kong, and W. 2014. High-sensitivity Sensing Based on Intensity-Interrogated Bloch Surface Wave Sensors. Sensors and Actuators B: Chemical. 193(0): 467–471.
Mulvana, H., S. Cochran, and M. Hill. 2013. Ultrasound Assisted Particle and Cell Manipulation On-chip. Advanced Drug Delivery Reviews. 2013. 65(11–12): 1600–1610.
Kokkinos, C., A. Economou, and I. Raptis. 2012. Microfabricated Disposable Lab-on-a-Chip Sensors with Integrated Bismuth Microelectrode Arrays for Voltammetric Determination of Trace Metals. Analytica Chimica Acta. 710(0): 1–8.
Sun, T. 2010. On-chip Electrical Impedance Tomography for Imaging Biological Cells. Biosensors and Bioelectronics. 25(5): 1109–1115.
Sippola, C. B. and C .H. Ahn. 2005. A Ceramic Capacitive Pressure Microsensor With Screen-Printed Diaphragm. In Sensors, 2005 IEEE. 2005.
Li, and J. 2003. Field Emission Characteristic of Screen-printed Carbon Nanotube Cathode. Applied Surface Science. 220(1–4): 96–104.
Wissmann, and M. 2010. Alternative Mould Insert Fabrication Technology for Micromoulding by Galvanic Replication. In Design Test Integration And Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on. 2010.
Jung Chuan, C., Y.H. Tsai, and C. Chien-Cheng. 2008. Development of a Disposable All-Solid-State Ascorbic Acid Biosensor and Miniaturized Reference Electrode Fabricated on Single Substrate. Sensors Journal, IEEE. 8(9): 1571–1577.
Han. 2003. A Multi-layer Plastic/Glass Technology for Microfluidic Systems with Integrated Functionality. In TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003.
Metwally. 2011. SU-8-based Rapid Tooling for Thermal Roll Embossing. In Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on.
Sawan, M., M. A. Miled, and E. Ghafar-Zadeh. 2010. CMOS/microfluidic Lab-on-chip for cells-based Diagnostic Tools. In Engineering in Medicine and Biology Society (EMBC), 2010 Annual International Conference of the IEEE.
Evans, I. and T. York. 2004. Microelectronic Capacitance Transducer for Particle Detection. Sensors Journal, IEEE. 4(3): 364–372.
Lee and S. H. 2009. Cell-Based Olfactory Biosensor Using Microfabricated Planar Electrode. Biosensors and Bioelectronics. 24(8): 2659–2664.
Liang. 2006. A General Exact Method for Synthesizing Parallel-beam Projections from Cone-beam Projections by Filtered Backprojection. In Nuclear Science Symposium Conference Record, 2006. IEEE.
Gmitro, A. F., V. Tresp, and G. R. Gindi. 1990. Videographic Tomography. I. Reconstruction with Parallel-beam Projection Data. Medical Imaging, IEEE Transactions on. 9(4): 366–375.
Bonnet. 2000. Multiresolution Reconstruction in Fan-beam Tomography. In Nuclear Science Symposium Conference Record, 2000 IEEE.
Soumekh, and M. 1985. A Method of Image Reconstruction in Fan Beam Tomography. In Acoustics, Speech, and Signal Processing, IEEE International Conference on ICASSP '85.
Sanpanich. 2009. 2D Ultrasonic Reflection Tomography by Linear Array Transducer and Wave Reflector. In Computing and Communication Technologies, 2009. RIVF '09. International Conference on.
Hai-Dong, L., M. Halliwell, and P. N. T.. Wells. 2001. Continuous Wave Ultrasonic Tomography. Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on. 48(1): 285–292.
Elbuken. 2011. Detection of Microdroplet Size and Speed Using Capacitive Sensors. Sensors and Actuators A: Physical. 171(2): 55–62.
Downloads
Published
Issue
Section
License
Copyright of articles that appear in Jurnal Teknologi belongs exclusively to Penerbit Universiti Teknologi Malaysia (Penerbit UTM Press). This copyright covers the rights to reproduce the article, including reprints, electronic reproductions, or any other reproductions of similar nature.
