INFLUENCE OF SUBSTRATE MATERIALS ON THE STRUCTURAL PROPERTIES OF ZNO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING

Authors

  • S. Ahmad Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • N. D. Md Sin Faculty of Electrical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • Liyana Roslan Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • Hazriel Faizal Pahroraji Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • S. K. Alias Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • S. A. Sulaiman Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • Siti Mardini Hashim Faculty of Mechanical Engineering UiTM Pulau Pinang, Jalan Permatang Pauh, 13500 Seberang Perai, Pulau Pinang, Malaysia
  • M. N. Berhan Faculty of Mechanical Engineering, UiTM Shah Alam, 40450 Shah Alam, Malaysia
  • M. Rusop NANO-SciTech Centre, Faculty of Electrical Engineering, Universiti Teknologi MARA, 40450 Shah Alam, Malaysia

DOI:

https://doi.org/10.11113/jt.v76.5650

Keywords:

ZnO thin films, RF magnetron sputtering, substrate materials, structural properties

Abstract

ZnO films were deposited on glass and SiO2/Si substrate by RF magnetron sputtering technique using high purity ZnO target at various RF power. The structural properties of ZnO thin film deposited on glass and SiO2/Si substrate were studied. The structural properties of the films were carried out by the surface profiler and field emission scanning electron microscope (FESEM). It was found that the average grain size of ZnO increases with increasing RF power and ZnO deposited on SiO2/Si substrate with RF power between 50-150 Watt gave the lower average grain size which is desired for the gas sensor applications. 

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Published

2015-09-28

Issue

Vol. 76 No. 9: Engineering Design and Materials Integrity

Section

Science and Engineering

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How to Cite

INFLUENCE OF SUBSTRATE MATERIALS ON THE STRUCTURAL PROPERTIES OF ZNO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING. (2015). Jurnal Teknologi, 76(9). https://doi.org/10.11113/jt.v76.5650