INFLUENCE OF SUBSTRATE MATERIALS ON THE STRUCTURAL PROPERTIES OF ZNO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING

Authors

  • S. Ahmad Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • N. D. Md Sin Faculty of Electrical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • Liyana Roslan Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • Hazriel Faizal Pahroraji Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • S. K. Alias Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • S. A. Sulaiman Faculty of Mechanical Engineering, UiTM Johor, Kampus Pasir Gudang, Jln Purnama, 81750, Masai, Johor, Malaysia
  • Siti Mardini Hashim Faculty of Mechanical Engineering UiTM Pulau Pinang, Jalan Permatang Pauh, 13500 Seberang Perai, Pulau Pinang, Malaysia
  • M. N. Berhan Faculty of Mechanical Engineering, UiTM Shah Alam, 40450 Shah Alam, Malaysia
  • M. Rusop NANO-SciTech Centre, Faculty of Electrical Engineering, Universiti Teknologi MARA, 40450 Shah Alam, Malaysia

DOI:

https://doi.org/10.11113/jt.v76.5650

Keywords:

ZnO thin films, RF magnetron sputtering, substrate materials, structural properties

Abstract

ZnO films were deposited on glass and SiO2/Si substrate by RF magnetron sputtering technique using high purity ZnO target at various RF power. The structural properties of ZnO thin film deposited on glass and SiO2/Si substrate were studied. The structural properties of the films were carried out by the surface profiler and field emission scanning electron microscope (FESEM). It was found that the average grain size of ZnO increases with increasing RF power and ZnO deposited on SiO2/Si substrate with RF power between 50-150 Watt gave the lower average grain size which is desired for the gas sensor applications. 

References

Chemnasiry, W. & Hernandez, F. E. 2012. Gold Nanorod-based Mercury Sensor Using Functionalized Glass Substrates. Sensors and Actuators B: Chemical. 173: 322-328

Kashyout, A. B., Soliman, H. M. A., Shokry Hassan, H. and Abousehly, A. M. 2010. Fabrication of ZnO and ZnO: Sb Nanoparticles for Gas Sensor Applications. Journal of Nanomaterials. 2010: 1-8.

Carotta, M.C., Cervi, A., Di Natale, V., Gherardi, S., Giberti, A., Guidi, V., Puzzovio, D., Vendemiati, B., Martinelli, G. & Sacerdoti, M. 2009. ZnO Gas Sensors: A Comparison Between Nanoparticles and Nanotetrapods-based Thick Films. Sensors and Actuators B: Chemical. 137: 164-169.

Lee, J. B., Lee, M. H., Park, C. K. & Park, J. S. 2004. Effects of Lattice Mismatches in ZnO/substrate Structures on the Orientations of Zno Films and Characteristics of SAW Devices. Thin Solid Films. 447: 296-301.

Hierlemann, A., Brand, O., Hagleitner, C. & Baltes, H. 2003. Microfabrication Techniques for Chemical/Biosensors. Proceedings of the IEEE. 91: 839-863.

Chaabouni, F., Abaab, M. & Rezig, B. 2004. Metrological Characteristics Of Zno Oxygen Sensor At Room Temperature. Sensors and Actuators B: Chemical. 100: 200-204.

Shaoqiang, C., Jian, Z., Xiao, F., Xiaohua, W., Yanling, S., Qingsong, X., Chang, W., Jianzhong, Z. & Ziqiang, Z. 2005. Nanocrystalline ZnO Thin Films on Porous Silicon/Silicon Substrates Obtained by Sol–gel Technique. Applied Surface Science. 241: 384-391.

Water W. & Chu, S. Y. 2002. Physical & Structural Properties of Zno Sputtered Films. Materials Letters. 55: 67-72.

Selmi, M., Chaabouni, F., Abaab, M. & Rezig, B. 2008. Studies on the Properties of Sputter-deposited Al-doped ZnO films. Superlattices and Microstructures. 44: 268-275.

Park, D. J., Lee, J. Y., Park, T. E., Kim, Y. Y. & Cho, H. K. 2007. Improved Microstructural Properties of a Zno Thin Film Using a Buffer Layer In-situ Annealed in Argon Ambient. Thin Solid Films. 515: 6721-6725.

Bhattacharyya, P. Basu, P.K., Saha, H. & Basu, S. 2007. Fast Response Methane Sensor Using Nanocrystalline Zinc Oxide Thin Films Derived by Sol–gel Method. Sensors and Actuators B: Chemical. 124: 62-67.

Jin, H., Kim, Y. & Park, C. 2008. Analysis of Microstructure and Electrical Properties of Al-doped p-type ZnO Thin Films. 288-291.

Wang, Q. P., Zhang, D. H., Xue, Z. Y. & Zhang, X. J. 2004. Mechanisms of Green Emission from ZnO Films Prepared by Rf Magnetron Sputtering. Optical Materials. 26: 23-26.

Son, J. I., Shim, J. H. & Cho, N. H. 2011. Variations in Electrical and Physical Properties of Al: ZnO Films with Preparation Conditions. Metals and Materials International. 17: 99-104.

Lu, Y. M., Hwang, W. S., Liu, W. Y. & Yang, J. S. 2001. Effect of RF Power on Optical and Electrical Properties of Zno Thin Film by Magnetron Sputtering. Materials Chemistry and Physics. 72: 269-272.

Hwang, D. K., Bang, K. H., Jeong, M. C. & Myoung, J. M. 2003. Effects of RF Power Variation on Properties of Zno Thin Films and Electrical Properties of P–N Homojunction. Journal of Crystal Growth. 254: 449-455.

Nam Ho Kim & Hyoun Woo Kim. 2004. Room Temperature Growth of Zinc Oxide Films on Si Substrates by the RF Magnetron Sputtering. Materials Letters. 58: 938-943.

Wang, X. J., Lei, Q. S., Yuan, J. M., Zhou, W. L. & Yu, J. 2010. Effects of Power on Properties of ZnO: Al Films Deposited on Flexible Substrates by RF Magnetron Sputtering. 163-167.

Yang, C., Zeng, Z., Chen, Z., Liu, J. & Zhang, S. 2006. Characterization of ZnO Thin Films Deposited on Diamond-like Carbon Coated Onto Si and SiO2/Si Substrate. Journal of Crystal Growth. 293: 299-304.

Dong, L. F., Cui, Z. L. & Zhang, Z. K. 1997. Gas Sensing Properties of Nano-Zno Prepared by Arc Plasma Method. Nanostructured Materials. 8: 815-823.

Gong, H., Hu, J.Q., Wang, J. H., Ong, C. H. & Zhu, F. R. 2006. Nano-crystalline Cu-doped ZnO Thin Film Gas Sensor for CO. Sensors and Actuators B: Chemical. 115: 247-251.

Xu, J., Pan, Q., Shun, Y. & Tian, Z. 2000. Grain Size Control and Gas Sensing Properties of Zno Gas Sensor. Sensors and Actuators B: Chemical. 66: 277-279.

Downloads

Published

2015-09-28

Issue

Vol. 76 No. 9: Engineering Design and Materials Integrity

Section

Science and Engineering

License

Copyright of articles that appear in Jurnal Teknologi belongs exclusively to Penerbit Universiti Teknologi Malaysia (Penerbit UTM Press). This copyright covers the rights to reproduce the article, including reprints, electronic reproductions, or any other reproductions of similar nature.

How to Cite

INFLUENCE OF SUBSTRATE MATERIALS ON THE STRUCTURAL PROPERTIES OF ZNO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING. (2015). Jurnal Teknologi (Sciences & Engineering), 76(9). https://doi.org/10.11113/jt.v76.5650