FABRICATION OF CARBON THIN FILMS BY PULSED LASER DEPOSITION IN DIFFERENT AMBIENT ENVIRONMENTS
DOI:
https://doi.org/10.11113/jt.v78.7506Keywords:
Pulsed Laser Deposition, Nd, YAG Laser, carbon thin filmAbstract
In this work, carbon thin films are grown in different background environments (Air, Helium and Argon) at different pressures (60, 160, 500 and 1000 mbar) by ablating the graphite target with Nd:YAG laser of wavelength of 1064 nm, pulse energy of 740 mJ and pulse rate of 6 ns. 10,000 laser shots are used to ablate graphite target under different ambient conditions. Grown thin films are analyzed by Atomic Force Microscopy (AFM) to measure thickness, roughness average, maximum profile peak height, average maximum height of profile and spacing ratio of the surface. The obtained results show that the roughness average, thickness of film, maximum profile peak height, average maximum height of profile and spacing ratio of thin films decreases with increase in ambient pressuresand shows highest value at low pressure (160 mbar) in helium environment as compared with air and argon.
References
Wang, Z. L., 2004. Zinc Oxide Nanostructures: Growth, Properties And Applications. Journal of Physics: Condensed Matter. 16(25): R829.
Watcharotone, S. 2007. Graphene-Silica Composite Thin Films As Transparent Conductors. Nano Letters. 7(7): 1888-1892.
Chaudhary, K. 2011. Graphite Thin Film Deposition using Laser Induced Plasma. Procedia Engineering. 8: 423-427.
Chrisey, D. B., and G. K. Hubler, 1994. Pulsed Laser Deposition Of Thin Films.
Crawley, J. A. and V. J. Saywell, 1999. Chemical Vapor Deposition. Google Patents. Editor^Editors.
Sigmund, P., 1969. Theory of Sputtering. I. Sputtering Yield Of Amorphous And Polycrystalline Targets. Physical Review. 184(2): 383.
Harper, J. M., 1978. Ion Beam Deposition. Thin Film Processes. 175-208.
Zhao, J.-L., et al. 2005. Structural, Optical And Electrical Properties Of Zno Films Grown By Pulsed Laser Deposition (PLD). Journal of Crystal Growth. 276(3): 507-512.
Guzmán, F., et al. 2012. Pulsed Laser Deposition Of Carbon Films In Low Pressure Neutral Gas Background. Journal of Physics: Conference Series. IOP Publishing.
Loir, A.-S., et al. 2003. Study Of Plasma Expansion Induced By Femtosecond Pulsed Laser Ablation And Deposition Of Diamond-Like Carbon Films. Applied Surface Science. 208: 553-560.
Aké, C. S., H. Sobral, and M. Villagrán-Muniz, 2007. Plasma Characterization Of Cross-Beam Pulsed-Laser Ablation Used For Carbon Thin Film Deposition. Thin Solid Films. 516(1): 8-12.
Lettington, A. H., 1993. Applications Of Diamond-Like Carbon Thin Films. Philosophical Transactions of the Royal Society of London A: Mathematical, Physical and Engineering Sciences. 342(1664): 287-296.
Qindeel, R., et al., 2010. Investigation Of Carbon Thin Films By Pulsed Laser Deposition At Different Temperatures. Journal of Non-Oxide Glasses. 1(4): 191-197.
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