Etching Performance Improvement On Semiconductor Silicon Wafers With Redesigned Etching Drum

Rozzeta Dolah; Hamidon Musa; Astuty Amrin

doi:10.11113/jt.v55.77

Etching Performance Improvement On Semiconductor Silicon Wafers With Redesigned Etching Drum

Authors

Rozzeta Dolah
Hamidon Musa
Astuty Amrin

DOI:

https://doi.org/10.11113/jt.v55.77

Abstract

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Published

2011-12-14

Issue

Vol 55 (May 2011)

Section

Science and Engineering

License

Copyright of articles that appear in Jurnal Teknologi belongs exclusively to Penerbit Universiti Teknologi Malaysia (Penerbit UTM Press). This copyright covers the rights to reproduce the article, including reprints, electronic reproductions, or any other reproductions of similar nature.

How to Cite

Etching Performance Improvement On Semiconductor Silicon Wafers With Redesigned Etching Drum. (2011). Jurnal Teknologi, 55(1), 53â€“65. https://doi.org/10.11113/jt.v55.77