Etching Performance Improvement On Semiconductor Silicon Wafers With Redesigned Etching Drum. Jurnal Teknologi, [S. l.], v. 55, n. 1, p. 53–65, 2011. DOI: 10.11113/jt.v55.77. Disponível em: https://journals.utm.my/jurnalteknologi/article/view/77.. Acesso em: 23 jul. 2024.